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Asher device Product List

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Tabletop Atmospheric Pressure Asher Device SS-50

Tabletop Atmospheric Pressure Asher Device SS-50

Easy to handle with a handy type. Since it is a handy type, it can also be used on uneven surfaces. Ultra-lightweight.

- Handy type and easy to handle - Control box is a compact tabletop type - Hydrophilization depending on the gas used - Plasma generation using air - Can process uneven surfaces due to its handy type - Operates with an AC100V outlet - Ultra-lightweight (control box specification of 4kg available)

  • Plasma Generator
  • Asher device

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Batch-type plasma ashing device, wafer asher device

Batch-type plasma ashing device, wafer asher device

50-piece batch plasma ashing system (asher) compatible with 6-inch and 8-inch wafers. There is also a wafer single-piece processing type available.

We offer high-performance devices at low prices. Ashing rate: over 300 Å, in-plane uniformity: ±20% or less, inter-batch uniformity: ±20% or less, processing capacity: 150 wafers/hour (calculated at RF0 minutes). We also provide low-cost batch-type ashers and etchers. We accept retrofitting of aging equipment as well.

  • Ashing device
  • Other semiconductor manufacturing equipment
  • Asher device

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